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Petri net-based scheduling analysis of dual-arm cluster tools subject to wafer revisiting and residency time constraints.

, , , and . ICNSC, page 252-257. IEEE, (2013)

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Modeling, Analysis and Control of Dual-Arm Cluster Tools With Residency Time Constraint and Activity Time Variation Based on Petri Nets., and . IEEE Trans Autom. Sci. Eng., 9 (2): 446-454 (2012)IoT-Enabled Real-Time Production Performance Analysis and Exception Diagnosis Model., , , and . IEEE Trans Autom. Sci. Eng., 13 (3): 1318-1332 (2016)Petri Net-Based Polynomially Complex Approach to Optimal One-Wafer Cyclic Scheduling of Hybrid Multi-Cluster Tools in Semiconductor Manufacturing., , , and . IEEE Trans. Syst. Man Cybern. Syst., 44 (12): 1598-1610 (2014)Real-time deadlock-free scheduling for semiconductor track systems based on colored timed Petri nets., and . OR Spectrum, 29 (3): 421-443 (2007)Petri net-based real-time scheduling of time-constrained single-arm cluster tools with activity time variation., , and . ICRA, page 5056-5061. IEEE, (2012)Schedulability and Scheduling of Dual-Arm Cluster Tools with Residency Time Constraints Based on Petri Net., and . CASE, page 87-92. IEEE, (2006)Petri net-based scheduling of time-constrained dual-arm cluster tools with bounded activity time variation., and . CASE, page 465-470. IEEE, (2010)Modeling and analysis of dual-arm cluster tools for wafer fabrication with revisiting., , and . CASE, page 90-95. IEEE, (2011)Linear programming-based approach to scheduling of crude oil operations in refinery with oil type mixing requirement., , and . CASE, page 430-435. IEEE, (2014)Resource-Oriented Petri Net-Based Approach to Deadlock Prevention of AMSs., , and . SMC, page 515-520. IEEE, (2015)