%0 Conference Paper %1 conf/3dic/NorikiLBFFK11 %A Noriki, Akihiro %A Lee, Kang Wook %A Bea, Jichoel %A Fukushima, Takafumi %A Tanaka, Tetsu %A Koyanagi, Mitsumasa %B 3DIC %D 2011 %E Koyanagi, Mitsumasa %E Kada, Morihiro %I IEEE %K dblp %P 1-4 %T Fabrication tolerance evaluation of high efficient unidirectional optical coupler for though silicon photonic via in optoelectronic 3D-LSI. %U http://dblp.uni-trier.de/db/conf/3dic/3dic2011.html#NorikiLBFFK11 %@ 978-1-4673-2189-1

@inproceedings{conf/3dic/NorikiLBFFK11, added-at = {2021-02-16T00:00:00.000+0100}, author = {Noriki, Akihiro and Lee, Kang Wook and Bea, Jichoel and Fukushima, Takafumi and Tanaka, Tetsu and Koyanagi, Mitsumasa}, biburl = {https://www.bibsonomy.org/bibtex/2b4e87fe254df47e1b73ccebd20267285/dblp}, booktitle = {3DIC}, crossref = {conf/3dic/2011}, editor = {Koyanagi, Mitsumasa and Kada, Morihiro}, ee = {https://doi.org/10.1109/3DIC.2012.6262957}, interhash = {2189b965b6d2549e649813144afb498a}, intrahash = {b4e87fe254df47e1b73ccebd20267285}, isbn = {978-1-4673-2189-1}, keywords = {dblp}, pages = {1-4}, publisher = {IEEE}, timestamp = {2024-04-10T12:11:22.000+0200}, title = {Fabrication tolerance evaluation of high efficient unidirectional optical coupler for though silicon photonic via in optoelectronic 3D-LSI.}, url = {http://dblp.uni-trier.de/db/conf/3dic/3dic2011.html#NorikiLBFFK11}, year = 2011 }