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Fabrication tolerance evaluation of high efficient unidirectional optical coupler for though silicon photonic via in optoelectronic 3D-LSI.

, , , , , and . 3DIC, page 1-4. IEEE, (2011)

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Micro-Raman spectroscopy analysis and capacitance - time (C-t) measurement of thinned silicon substrates for 3D integration., , , , , , , , and . 3DIC, page 1-5. IEEE, (2009)Demonstration of Optical Re-Distribution on Silicon Photonics Die Using Polymer Waveguide and Micro Mirrors., , , , , , , , , and . ECOC, page 1-4. IEEE, (2020)10 µm fine pitch Cu/Sn micro-bumps for 3-D super-chip stack., , , , , , , , , and . 3DIC, page 1-6. IEEE, (2009)Fabrication tolerance evaluation of high efficient unidirectional optical coupler for though silicon photonic via in optoelectronic 3D-LSI., , , , , and . 3DIC, page 1-4. IEEE, (2011)Polymer Waveguide-coupled Co-packaged Silicon Photonics-die Embedded Package Substrate., , , , , , , , , and 2 other author(s). OFC, page 1-3. IEEE, (2021)Through Silicon photonic via (TSPV) with Si core for low loss and high-speed data transmission in opto-electronic 3-D LSI., , , , , and . 3DIC, page 1-4. IEEE, (2010)Optical TSV Using Si-Photonics Integrated Curved Micro-Mirror., , , , , , , , and . 3DIC, page 1-4. IEEE, (2019)Vertical Optical and Electrical Interconnection for Chip-Scale-Packaged Si Photonic Transceivers., , , , , , , , and . 3DIC, page 1-6. IEEE, (2019)