%0 Conference Paper %1 conf/3dic/YanDCLFK15 %A Yan, Yangyang %A Ding, Yingtao %A Chen, Qianwen %A Lee, Kang Wook %A Fukushima, Takafumi %A Koyanagi, Mitsumasa %B 3DIC %D 2015 %I IEEE %K dblp %P TS5.2.1-TS5.2.5 %T Vacuum-assisted-spin-coating of polyimide liner for high-aspect-ratio TSVs applications. %U http://dblp.uni-trier.de/db/conf/3dic/3dic2015.html#YanDCLFK15 %@ 978-1-4673-9385-0

@inproceedings{conf/3dic/YanDCLFK15, added-at = {2021-02-16T00:00:00.000+0100}, author = {Yan, Yangyang and Ding, Yingtao and Chen, Qianwen and Lee, Kang Wook and Fukushima, Takafumi and Koyanagi, Mitsumasa}, biburl = {https://www.bibsonomy.org/bibtex/2ef035a5936b5889dec31a2378e117e69/dblp}, booktitle = {3DIC}, crossref = {conf/3dic/2015}, ee = {https://doi.org/10.1109/3DIC.2015.7334568}, interhash = {39673c31732276326236270d2a457c30}, intrahash = {ef035a5936b5889dec31a2378e117e69}, isbn = {978-1-4673-9385-0}, keywords = {dblp}, pages = {TS5.2.1-TS5.2.5}, publisher = {IEEE}, timestamp = {2024-04-10T12:10:59.000+0200}, title = {Vacuum-assisted-spin-coating of polyimide liner for high-aspect-ratio TSVs applications.}, url = {http://dblp.uni-trier.de/db/conf/3dic/3dic2015.html#YanDCLFK15}, year = 2015 }