%0 Conference Paper %1 conf/irps/TierncALJVSBCBR24 %A Tiernc, D. %A Arreghini, Antonio %A Lesniewska, Alicja %A Jeong, Y. %A van der Veen, Marleen H. %A Stiers, J. %A Bazzazian, N. %A Ciofi, Ivan %A den Bosch, Geert Van %A Rosmeulen, Maarten %B IRPS %D 2024 %I IEEE %K dblp %P 1-5 %T Exploring the Reliability Limits for the Z-Pitch Scaling of Molybdenum Inter-Word Line Oxides in 3D NAND. %U http://dblp.uni-trier.de/db/conf/irps/irps2024.html#TierncALJVSBCBR24 %@ 979-8-3503-6976-2

@inproceedings{conf/irps/TierncALJVSBCBR24, added-at = {2024-05-29T00:00:00.000+0200}, author = {Tiernc, D. and Arreghini, Antonio and Lesniewska, Alicja and Jeong, Y. and van der Veen, Marleen H. and Stiers, J. and Bazzazian, N. and Ciofi, Ivan and den Bosch, Geert Van and Rosmeulen, Maarten}, biburl = {https://www.bibsonomy.org/bibtex/24dc967014df5c41da786ad1122b7f722/dblp}, booktitle = {IRPS}, crossref = {conf/irps/2024}, ee = {https://doi.org/10.1109/IRPS48228.2024.10529305}, interhash = {5fa66e6ea6d040e8345d53dfbff28835}, intrahash = {4dc967014df5c41da786ad1122b7f722}, isbn = {979-8-3503-6976-2}, keywords = {dblp}, pages = {1-5}, publisher = {IEEE}, timestamp = {2024-06-03T07:16:33.000+0200}, title = {Exploring the Reliability Limits for the Z-Pitch Scaling of Molybdenum Inter-Word Line Oxides in 3D NAND.}, url = {http://dblp.uni-trier.de/db/conf/irps/irps2024.html#TierncALJVSBCBR24}, year = 2024 }