%0 Conference Paper %1 conf/case/KaoCC14 %A Kao, Yu-Ting %A Chang, Shi-Chung %A Chang, Chun-Ming %B CASE %D 2014 %I IEEE %K dblp %P 774-779 %T Target setting with consideration of target-induced operation variability for performance improvement of semiconductor fabrication. %U http://dblp.uni-trier.de/db/conf/case/case2014.html#KaoCC14

@inproceedings{conf/case/KaoCC14, added-at = {2017-06-01T00:00:00.000+0200}, author = {Kao, Yu-Ting and Chang, Shi-Chung and Chang, Chun-Ming}, biburl = {https://www.bibsonomy.org/bibtex/2cbb93abd06d3c987c91f723e3eb324a5/dblp}, booktitle = {CASE}, crossref = {conf/case/2014}, ee = {https://doi.org/10.1109/CoASE.2014.6899413}, interhash = {76bd64569b840a87525b3f89b83c7d4b}, intrahash = {cbb93abd06d3c987c91f723e3eb324a5}, keywords = {dblp}, pages = {774-779}, publisher = {IEEE}, timestamp = {2019-10-17T21:19:03.000+0200}, title = {Target setting with consideration of target-induced operation variability for performance improvement of semiconductor fabrication.}, url = {http://dblp.uni-trier.de/db/conf/case/case2014.html#KaoCC14}, year = 2014 }