%0 Book %1 citeulike:13525275 %B Mechanical and Aerospace Engineering Series %D 2005 %E Gad-el Hak, Mohamed %I CRC/Taylor & Francis %K mems %T MEMS: Design and Fabrication %U https://www.crcpress.com/MEMS-Design-and-Fabrication/Gad-el-Hak/p/book/9780849391385 %@ 1420036564

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