%0 Conference Paper %1 conf/icaiic/ChoLSP21 %A Cho, Hyung-Min %A Lee, Kyung-Hee %A Shim, Peter %A Park, Anthony %B ICAIIC %D 2021 %I IEEE %K dblp %P 488-491 %T A Chemical Monitoring and Prediction System in Semiconductor Manufacturing Process Using Bigdata and AI Techniques. %U http://dblp.uni-trier.de/db/conf/icaiic/icaiic2021.html#ChoLSP21 %@ 978-1-7281-7638-3

@inproceedings{conf/icaiic/ChoLSP21, added-at = {2021-05-04T00:00:00.000+0200}, author = {Cho, Hyung-Min and Lee, Kyung-Hee and Shim, Peter and Park, Anthony}, biburl = {https://www.bibsonomy.org/bibtex/2f23b2427e01c94d2c019f40f92a6a48a/dblp}, booktitle = {ICAIIC}, crossref = {conf/icaiic/2021}, ee = {https://doi.org/10.1109/ICAIIC51459.2021.9415241}, interhash = {8db39953689a7db58221a0f053177222}, intrahash = {f23b2427e01c94d2c019f40f92a6a48a}, isbn = {978-1-7281-7638-3}, keywords = {dblp}, pages = {488-491}, publisher = {IEEE}, timestamp = {2024-04-09T14:09:55.000+0200}, title = {A Chemical Monitoring and Prediction System in Semiconductor Manufacturing Process Using Bigdata and AI Techniques.}, url = {http://dblp.uni-trier.de/db/conf/icaiic/icaiic2021.html#ChoLSP21}, year = 2021 }