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%0 Conference Paper
%1 conf/icaiic/ChoLSP21
%A Cho, Hyung-Min
%A Lee, Kyung-Hee
%A Shim, Peter
%A Park, Anthony
%B ICAIIC
%D 2021
%I IEEE
%K dblp
%P 488-491
%T A Chemical Monitoring and Prediction System in Semiconductor Manufacturing Process Using Bigdata and AI Techniques.
%U http://dblp.uni-trier.de/db/conf/icaiic/icaiic2021.html#ChoLSP21
%@ 978-1-7281-7638-3
@inproceedings{conf/icaiic/ChoLSP21,
added-at = {2021-05-04T00:00:00.000+0200},
author = {Cho, Hyung-Min and Lee, Kyung-Hee and Shim, Peter and Park, Anthony},
biburl = {https://www.bibsonomy.org/bibtex/2f23b2427e01c94d2c019f40f92a6a48a/dblp},
booktitle = {ICAIIC},
crossref = {conf/icaiic/2021},
ee = {https://doi.org/10.1109/ICAIIC51459.2021.9415241},
interhash = {8db39953689a7db58221a0f053177222},
intrahash = {f23b2427e01c94d2c019f40f92a6a48a},
isbn = {978-1-7281-7638-3},
keywords = {dblp},
pages = {488-491},
publisher = {IEEE},
timestamp = {2024-04-09T14:09:55.000+0200},
title = {A Chemical Monitoring and Prediction System in Semiconductor Manufacturing Process Using Bigdata and AI Techniques.},
url = {http://dblp.uni-trier.de/db/conf/icaiic/icaiic2021.html#ChoLSP21},
year = 2021
}