%0 Conference Paper %1 conf/imw2/RachidiAVDBKObR22 %A Rachidi, S. %A Arreghini, Antonio %A Verreck, Devin %A Donadio, G. L. %A Banerjee, K. %A Katcko, K. %A Oniki, Y. %A den Bosch, Geert Van %A Rosmeulen, Maarten %B IMW %D 2022 %I IEEE %K dblp %P 1-4 %T At the Extreme of 3D-NAND Scaling: 25 nm Z-Pitch with 10 nm Word Line Cells. %U http://dblp.uni-trier.de/db/conf/imw2/imw2022.html#RachidiAVDBKObR22 %@ 978-1-6654-9947-7

@inproceedings{conf/imw2/RachidiAVDBKObR22, added-at = {2024-05-29T00:00:00.000+0200}, author = {Rachidi, S. and Arreghini, Antonio and Verreck, Devin and Donadio, G. L. and Banerjee, K. and Katcko, K. and Oniki, Y. and den Bosch, Geert Van and Rosmeulen, Maarten}, biburl = {https://www.bibsonomy.org/bibtex/29132642f369a994207ee06d8b74a9a30/dblp}, booktitle = {IMW}, crossref = {conf/imw2/2022}, ee = {https://doi.org/10.1109/IMW52921.2022.9779303}, interhash = {9bccb3c82d1b6dcb1db9341dd33571d1}, intrahash = {9132642f369a994207ee06d8b74a9a30}, isbn = {978-1-6654-9947-7}, keywords = {dblp}, pages = {1-4}, publisher = {IEEE}, timestamp = {2024-06-03T07:19:38.000+0200}, title = {At the Extreme of 3D-NAND Scaling: 25 nm Z-Pitch with 10 nm Word Line Cells.}, url = {http://dblp.uni-trier.de/db/conf/imw2/imw2022.html#RachidiAVDBKObR22}, year = 2022 }