%0 Conference Paper %1 conf/nems/VoCC22 %A Vo, Tuan Ngoc Anh %A Chen, Pin-Chuan %A Chen, Yu-Hsiang %B NEMS %D 2022 %I IEEE %K dblp %P 1-5 %T Applying Hybrid Bonding Technique to Manufacture A Peristaltic Micropump With Extremely High Flow Rate. %U http://dblp.uni-trier.de/db/conf/nems/nems2022.html#VoCC22 %@ 978-1-6654-8301-8

@inproceedings{conf/nems/VoCC22, added-at = {2022-06-22T00:00:00.000+0200}, author = {Vo, Tuan Ngoc Anh and Chen, Pin-Chuan and Chen, Yu-Hsiang}, biburl = {https://www.bibsonomy.org/bibtex/24fc36bba9e7036088e31b833705db68e/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2022}, ee = {https://doi.org/10.1109/NEMS54180.2022.9791205}, interhash = {ab12f749f82c50b56044cef8466ab740}, intrahash = {4fc36bba9e7036088e31b833705db68e}, isbn = {978-1-6654-8301-8}, keywords = {dblp}, pages = {1-5}, publisher = {IEEE}, timestamp = {2024-04-09T19:16:28.000+0200}, title = {Applying Hybrid Bonding Technique to Manufacture A Peristaltic Micropump With Extremely High Flow Rate.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2022.html#VoCC22}, year = 2022 }