%0 Conference Paper %1 conf/icicdt/BesnardNM22 %A Besnard, Guillaume %A Nguyen, Bich-Yen %A Maleville, Christophe %B ICICDT %D 2022 %I IEEE %K dblp %P 81-83 %T Smart Cut™ technology: from Substrate Enginnering to Advanced 3D Integration. %U http://dblp.uni-trier.de/db/conf/icicdt/icicdt2022.html#BesnardNM22 %@ 978-1-6654-5901-3

@inproceedings{conf/icicdt/BesnardNM22, added-at = {2022-11-16T00:00:00.000+0100}, author = {Besnard, Guillaume and Nguyen, Bich-Yen and Maleville, Christophe}, biburl = {https://www.bibsonomy.org/bibtex/208e0879560b25d028132203a6825b4a3/dblp}, booktitle = {ICICDT}, crossref = {conf/icicdt/2022}, ee = {https://doi.org/10.1109/ICICDT56182.2022.9933105}, interhash = {b6bb7d396c9134ee227255c38fd4812d}, intrahash = {08e0879560b25d028132203a6825b4a3}, isbn = {978-1-6654-5901-3}, keywords = {dblp}, pages = {81-83}, publisher = {IEEE}, timestamp = {2024-04-09T22:44:35.000+0200}, title = {Smart Cut™ technology: from Substrate Enginnering to Advanced 3D Integration.}, url = {http://dblp.uni-trier.de/db/conf/icicdt/icicdt2022.html#BesnardNM22}, year = 2022 }