%0 Journal Article %1 Deinhart_2021 %A Deinhart, Victor %A Kern, Lisa-Marie %A Kirchhof, Jan N %A Juergensen, Sabrina %A Sturm, Joris %A Krauss, Enno %A Feichtner, Thorsten %A Kovalchuk, Sviatoslav %A Schneider, Michael %A Engel, Dieter %A Pfau, Bastian %A Hecht, Bert %A Bolotin, Kirill I %A Reich, Stephanie %A Höflich, Katja %D 2021 %I Beilstein Institut %J Beilstein J. Nanotechnol. %K c %P 304--318 %R 10.3762/bjnano.12.25 %T The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication %U https://doi.org/10.3762%2Fbjnano.12.25 %V 12

@article{Deinhart_2021, added-at = {2023-11-13T15:29:22.000+0100}, author = {Deinhart, Victor and Kern, Lisa-Marie and Kirchhof, Jan N and Juergensen, Sabrina and Sturm, Joris and Krauss, Enno and Feichtner, Thorsten and Kovalchuk, Sviatoslav and Schneider, Michael and Engel, Dieter and Pfau, Bastian and Hecht, Bert and Bolotin, Kirill I and Reich, Stephanie and Höflich, Katja}, biburl = {https://www.bibsonomy.org/bibtex/2aaee5276218fcd2a199f4e76fe1a66ae/ctqmat}, day = 06, description = {BJNANO - The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication}, doi = {10.3762/bjnano.12.25}, interhash = {cdf34c7119413a7d5c6e00b9ff5e4540}, intrahash = {aaee5276218fcd2a199f4e76fe1a66ae}, journal = {Beilstein J. Nanotechnol.}, keywords = {c}, month = {04}, pages = {304--318}, publisher = {Beilstein Institut}, timestamp = {2023-11-24T11:46:24.000+0100}, title = {The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication}, url = {https://doi.org/10.3762%2Fbjnano.12.25}, volume = 12, year = 2021 }