%0 Report %1 info3-techreport-1999-11 %A Dümmler, Matthias %D 1999 %K myown %N 231 %T Simulation und Leistungsbewertung von Cluster Tools in der Halbleiterfertigung

@techreport{info3-techreport-1999-11, added-at = {2016-03-10T17:38:44.000+0100}, author = {Dümmler, Matthias}, biburl = {https://www.bibsonomy.org/bibtex/251700b965beb9ab6bcc248085dee988a/uniwue_info3}, institution = {University of Wuerzburg}, interhash = {ea90a148599182e641b7c53b2e26f612}, intrahash = {51700b965beb9ab6bcc248085dee988a}, keywords = {myown}, month = {7}, number = 231, timestamp = {2022-03-14T00:11:14.000+0100}, title = {Simulation und Leistungsbewertung von Cluster Tools in der Halbleiterfertigung}, year = 1999 }