%0 Journal Article %1 journals/tcst/SalamPEGA97 %A Salam, Fathi M. A. %A Piwek, Christian %A Erten, Gamze %A Grotjohn, Timothy A. %A Asmussen, Jes %D 1997 %J IEEE Trans. Contr. Sys. Techn. %K dblp %N 6 %P 598-613 %T Modeling of a plasma processing machine for semiconductor wafer etching using energy-functions-based neural networks. %U http://dblp.uni-trier.de/db/journals/tcst/tcst5.html#SalamPEGA97 %V 5

@article{journals/tcst/SalamPEGA97, added-at = {2015-07-24T00:00:00.000+0200}, author = {Salam, Fathi M. A. and Piwek, Christian and Erten, Gamze and Grotjohn, Timothy A. and Asmussen, Jes}, biburl = {https://www.bibsonomy.org/bibtex/2a07a013e5270334dec87f558952a0ca4/dblp}, ee = {http://dx.doi.org/10.1109/87.641404}, interhash = {464036a8db8fbfe8a69e752e17e746cc}, intrahash = {a07a013e5270334dec87f558952a0ca4}, journal = {IEEE Trans. Contr. Sys. Techn.}, keywords = {dblp}, number = 6, pages = {598-613}, timestamp = {2015-07-25T11:34:37.000+0200}, title = {Modeling of a plasma processing machine for semiconductor wafer etching using energy-functions-based neural networks.}, url = {http://dblp.uni-trier.de/db/journals/tcst/tcst5.html#SalamPEGA97}, volume = 5, year = 1997 }