%0 Conference Paper %1 conf/icicdt/IkedaTYKEO15 %A Ikeda, Taro %A Tanihara, Akira %A Yamamoto, Nobuhiko %A Kasai, Shigeru %A Eriguchi, Koji %A Ono, Kouichi %B ICICDT %D 2015 %I IEEE %K dblp %P 1-4 %T Plasma-induced photon irradiation damage on low-k dielectrics enhanced by Cu-line layout. %U http://dblp.uni-trier.de/db/conf/icicdt/icicdt2015.html#IkedaTYKEO15 %@ 978-1-4799-7669-0

@inproceedings{conf/icicdt/IkedaTYKEO15, added-at = {2016-05-17T00:00:00.000+0200}, author = {Ikeda, Taro and Tanihara, Akira and Yamamoto, Nobuhiko and Kasai, Shigeru and Eriguchi, Koji and Ono, Kouichi}, biburl = {https://www.bibsonomy.org/bibtex/2a57dae61c2b360747aca7df4fbac3e43/dblp}, booktitle = {ICICDT}, crossref = {conf/icicdt/2015}, ee = {http://dx.doi.org/10.1109/ICICDT.2015.7165901}, interhash = {e377ceb07bad1464d2784d9096073083}, intrahash = {a57dae61c2b360747aca7df4fbac3e43}, isbn = {978-1-4799-7669-0}, keywords = {dblp}, pages = {1-4}, publisher = {IEEE}, timestamp = {2016-05-18T11:45:05.000+0200}, title = {Plasma-induced photon irradiation damage on low-k dielectrics enhanced by Cu-line layout.}, url = {http://dblp.uni-trier.de/db/conf/icicdt/icicdt2015.html#IkedaTYKEO15}, year = 2015 }