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Disambiguation of "Eriguchi, Koji"

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Plasma-induced photon irradiation damage on low-k dielectrics enhanced by Cu-line layout.

, , , , , and . ICICDT, page 1-4. IEEE, (2015)

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Koji Kameo

Koji Onoda

Koji Ota

Tomoko Kojima

Hajime Kojima

 

Other publications of authors with the same name

Atomistic simulations of plasma process-induced Si substrate damage - Effects of substrate bias-power frequency., , , , and . ICICDT, page 191-194. IEEE, (2013)A new prediction method for ReRAM data retention statistics based on 3D filament structures., , , , , and . IRPS, page 5. IEEE, (2015)Plasma-induced photon irradiation damage on low-k dielectrics enhanced by Cu-line layout., , , , , and . ICICDT, page 1-4. IEEE, (2015)Surface orientation dependence of ion bombardment damage during plasma processing., , and . ICICDT, page 1-5. IEEE, (2015)A new aspect of plasma-induced physical damage in three-dimensional scaled structures - Sidewall damage by stochastic straggling and sputtering., , and . ICICDT, page 1-5. IEEE, (2014)Random telegraph noise as a new measure of plasma-induced charging damage in MOSFETs., , , and . ICICDT, page 1-4. IEEE, (2014)Impacts of plasma process-induced damage on MOSFET parameter variability and reliability., and . Microelectron. Reliab., 55 (9-10): 1464-1470 (2015)Evaluation methodology for assessment of dielectric degradation and breakdown dynamics using time-dependent impedance spectroscopy (TDIS)., , and . IRPS, page 1-7. IEEE, (2021)Optimization problems for plasma-induced damage - A concept for plasma-induced damage design., , , , , and . ICICDT, page 1-4. IEEE, (2012)