%0 Conference Paper %1 conf/nems/QianWYY10 %A Qian, Liang %A Wang, Jia %A Yang, Zhenchuan %A Yan, Guizhen %B NEMS %D 2010 %I IEEE %K dblp %P 654-657 %T Fabrication of ultra-deep high-aspect-ratio isolation trench without void and its application. %U http://dblp.uni-trier.de/db/conf/nems/nems2010.html#QianWYY10 %@ 978-1-4244-6543-9

@inproceedings{conf/nems/QianWYY10, added-at = {2017-05-17T00:00:00.000+0200}, author = {Qian, Liang and Wang, Jia and Yang, Zhenchuan and Yan, Guizhen}, biburl = {https://www.bibsonomy.org/bibtex/20f5736c5b06535ebe731bc5a9ed5c844/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2010}, ee = {https://doi.org/10.1109/NEMS.2010.5592490}, interhash = {b0a487aadc36112589d0f3c1223405e4}, intrahash = {0f5736c5b06535ebe731bc5a9ed5c844}, isbn = {978-1-4244-6543-9}, keywords = {dblp}, pages = {654-657}, publisher = {IEEE}, timestamp = {2019-10-17T22:14:14.000+0200}, title = {Fabrication of ultra-deep high-aspect-ratio isolation trench without void and its application.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2010.html#QianWYY10}, year = 2010 }