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Fabrication of ultra-deep high-aspect-ratio isolation trench without void and its application.

, , , and . NEMS, page 654-657. IEEE, (2010)

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A method to reduce notching effect on the anchors of a micro-gyroscope., , , and . NEMS, page 338-341. IEEE, (2011)Improvement of transient response for drive loop of microgyroscope using 2-DOF PID controller., , , , and . NEMS, page 281-284. IEEE, (2011)Research on the ring-diode based readout circuit for MEMS vibratory gyroscopes., , , , and . NEMS, page 619-622. IEEE, (2017)Design and fabrication of a novel silicon probe for micromachined surface profilers., , , and . NEMS, page 941-944. IEEE, (2010)A novel method to measure the sidewall angle of MEMS structures., , , , and . IEEE SENSORS, page 1-3. IEEE, (2017)An Interface ASIC for an Atmospheric-Pressure MEMS Gyroscope with PLL-Based Phase Adjustment and SC Amplitude Regulation., , , and . ISCAS, page 1-5. IEEE, (2020)Digital fast startup procedure for micro-machined vibratory gyroscopes using optimized fuzzy control strategy., , , , , , , and . NEMS, page 208-211. IEEE, (2014)A single mask dry releasing process for making high aspect ratio soimemsdevices., , , and . NEMS, page 1040-1043. IEEE, (2010)Designing of a micromachined gyroscope system with a closed-loop DC biased interface ASIC., , , , , and . Sci. China Inf. Sci., 57 (10): 1-13 (2014)A Noncontact Fall Detection Method for Bedside Application With a MEMS Infrared Sensor and a Radar Sensor., , , , , , and . IEEE Internet Things J., 10 (14): 12577-12589 (July 2023)