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A novel failure response policy for single-arm cluster tools with residency time constraints.

, , , and . SMC, page 120-126. IEEE, (2014)

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Petri net-based response policies to process module failure in time-constrained single-arm cluster tools., , , and . ICNSC, page 144-149. IEEE, (2014)Petri net-based scheduling analysis of dual-arm cluster tools subject to wafer revisiting and residency time constraints., , , and . ICNSC, page 252-257. IEEE, (2013)Multi-Point Ethernet over Next-Generation SONET/SDH., , , , , , and . ICC, page 1-6. IEEE, (2009)An adaptive stochastic search algorithm., , , , and . ICAL, page 154-158. IEEE, (2011)LB-L2L-Calib: Accurate and Robust Extrinsic Calibration for Multiple 3D LiDARs with Long Baseline and Large Viewpoint Difference., , , , , and . ICRA, page 926-932. IEEE, (2022)Optimal scheduling of single-arm multi-cluster tools with two-space buffering modules., , , and . CASE, page 75-80. IEEE, (2014)How to start-up dual-arm cluster tools involving a wafer revisiting process., , and . CASE, page 1194-1199. IEEE, (2015)Non-intrusive Balance Tomography Using Reinforcement Learning in the Lightning Network., , and . ACM Trans. Priv. Secur., 27 (1): 12:1-12:32 (2024)LB-L2L-Calib 2.0: A Novel Online Extrinsic Calibration Method for Multiple Long Baseline 3D LiDARs Using Objects., , , , , , and . IROS, page 9354-9359. (2023)Evasion Attacks Based on Wasserstein Generative Adversarial Network., , and . ComComAP, page 454-459. IEEE, (2019)