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Two-dimensional, vision-based muN force sensor for microrobotics., , и . ICRA, стр. 1016-1021. IEEE, (2009)Aluminum Nitride reconfigurable RF-MEMS front-ends., , , , , и . ASICON, стр. 1046-1049. IEEE, (2011)Non-Volatile Ternary Content Addressable Memory based on Phase Change Nanoelectromechanical (NEM) Relay., , и . ESSCIRC, стр. 65-68. IEEE, (2022)An 18 nW -47/-40 dBm Sensitivity 3/100 kbps MEMS-Assisted CMOS Wake-Up Receiver., , , , , , , и . IEEE Trans. Circuits Syst. I Regul. Pap., 66-I (11): 4439-4447 (2019)A -173 dBc/Hz @ 1 MHz offset Colpitts oscillator using AlN contour-mode MEMS resonator., , , , и . CICC, стр. 1-4. IEEE, (2013)Ultra-low-power and high sensitivity resonant micromechanical receiver., , , , , , , , , и . IEEE SENSORS, стр. 1-3. IEEE, (2017)Neurocomputing and associative memories based on ovenized aluminum nitride resonators., , , , и . IJCNN, стр. 1-8. IEEE, (2013)A 47μW 204MHz AlN Contour-Mode MEMS based tunable oscillator in 65nm CMOS., , , , и . ISCAS, стр. 1757-1760. IEEE, (2013)1.5-GHz CMOS voltage-controlled oscillator based on thickness-field-excited piezoelectric AlN contour-mode MEMS resonators., , и . CICC, стр. 1-4. IEEE, (2010)