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Wafer defect inspection by neural analysis of region features.

, , , и . J. Intell. Manuf., 22 (6): 953-964 (2011)

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Ingrid Muder

Winfried Muder

Willi Muder

Katja Muderlak

Jih-Jau Jeng

 

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Normalized In-Line Stepper Coordinator Design by the Sequence Diagram and Production Rules: A Case Study., и . ICRA, стр. 3169-3174. IEEE, (2002)An Unsupervised Self-Organizing Neural Network for Automatic Semiconductor Wafer Defect Inspection., , и . ICRA, стр. 3000-3005. IEEE, (2005)Modeling a discrete event system using statecharts, , и . 2, стр. 1093--1098. (2004)Using a self-organizing neural network for wafer defect inspection., , и . SMC (5), стр. 4312-4317. IEEE, (2004)An Agent-Based Early Manufacturability Assessment for Collaborative Design in Coating Process., , , и . KES (2), том 4693 из Lecture Notes in Computer Science, стр. 649-655. Springer, (2007)A polynomial algorithm for checking diagnosability of Petri nets., , и . SMC, стр. 2542-2547. IEEE, (2005)Modeling and analysis of traffic light controller using Statechart., , и . SMC, стр. 557-562. IEEE, (2010)Enhancement of an deadlock prevention policy for FMSs using theory of regions., , , и . SMC, стр. 304-309. IEEE, (2010)Petri Net Modeling and Lagrangian Relaxation Approach to Vehicle Scheduling in 300 mm Semiconductor Manufacturing., , и . ICRA, стр. 5301-5306. IEEE, (2004)AN overview of semiconductor fab automation systems., и . ICRA, стр. 1050-1055. IEEE, (2003)