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Transient scheduling of single armed cluster tools: Algorithms for wafer residency constraints.

, and . CASE, page 856-861. IEEE, (2013)

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Control of wafer release in multi cluster tools., and . ICCA, page 1481-1487. IEEE, (2010)A Numerical Study on the Structure of Optimal Preventive Maintenance Policies in Prototype Tandem Queues., and . WSC, page 2281-2291. IEEE, (2019)Exit Time Recursions, Recording Principles, and Queue Equivalence in Generalized Regular Flow Lines., and . CASE, page 922-929. IEEE, (2019)Regular flow line models for semiconductor cluster tools: A case of lot dependent process times.. CASE, page 561-566. IEEE, (2009)A framework for stepwise life cycle assessment during product design with case-based reasoning., , and . CASE, page 118-123. IEEE, (2010)Implementation of a Fluctuation Smoothing Production Control Policy in IBM's 200mm Wafer Fab., , , and . CDC/ECC, page 7732-7737. IEEE, (2005)A unified approach to linear programming bounds for queueing networks: systems with polyhedral invariance of transition probabilities., and . CDC, page 546-551. IEEE, (2000)UAV Consumable Replenishment: Design Concepts for Automated Service Stations., , and . Journal of Intelligent and Robotic Systems, 61 (1-4): 369-397 (2011)On the Consequences of Un-Modeled Dynamics to the Optimality of Schedules in Clustered Photolithography Tools., , , and . WSC, page 2224-2235. IEEE, (2019)UAV Consumable Replenishment: Design Concepts for Automated Service Stations., , and . Journal of Intelligent and Robotic Systems, 61 (1-4): 369-397 (2011)