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Study on self-sensing electrostatic suspension using a variable capacitor.

, , , and . AMC, page 426-429. IEEE, (2010)

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Force Compensation Based on Observer for Assembly of Magnetized Components., , , , and . ASCC, page 538-542. IEEE, (2019)Development of non-contact carrier system using solar magnetic suspension (3ed report: Continuous 5-day and installation of sloping propulsion mechanism)., , , , and . ASCC, page 1-5. IEEE, (2015)Improvement of vibration isolation characteristics by Kalman-filter estimated acceleration feedback., , , and . ECC, page 1106-1111. IEEE, (2015)Vibration Isolation System with Kalman Filter Estimated Acceleration Feedback: An Approach of Negative Stiffness Control., , , , and . J. Sensors, (2021)Realization of Vibration Absorption at Multiple Frequencies on Vacuum Chamber with Cryopump., , , , , and . ASCC, page 699-703. IEEE, (2019)A 3-DOF modular vibration isolation system using zero-power magnetic suspension with adjustable negative stiffness., , , and . AMC, page 661-666. IEEE, (2010)Development of a three-axis active vibration isolation system using zero-power magnetic suspension., , , and . CDC, page 4493-4498. IEEE, (2003)Realization of acceleration feedback by using an active dynamic vibration absorber as a sensor in a low-frequency region., , , and . ECC, page 1681-1685. IEEE, (2015)Stiffness control of magnetic suspension by local current feedback., , and . ECC, page 3881-3886. IEEE, (2009)On the simultaneous realization of virtually zero-power and zero-compliance controls., , , and . CDC, page 5479-5484. IEEE, (2013)