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Anemometer for detection of very low speed air flow with three-dimensional directionality.

, , , , and . NEMS, page 615-618. IEEE, (2017)

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Design and fabrication of a mems capacitive accelerometer based on double-device-layers SOI wafer., , , , , and . NEMS, page 1036-1039. IEEE, (2010)High temperature pressure sensor using a thermostable electrode., , , , , , and . NEMS, page 201-204. IEEE, (2015)High-Performance Quasi-Vertical GaN Schottky Barrier Diode on Silicon Substrate with a Low Dislocation Density Drift Layer., , , , , , , , and . ICICDT, page 1-3. IEEE, (2019)Design and simulation of MEMS thermal and vibration isolator based on PDMS beam arrays., , , , , and . NEMS, page 213-216. IEEE, (2016)Design of a graphene capacitive pressure sensor for ultra-low pressure detection., , , , and . NEMS, page 192-195. IEEE, (2016)A Gas Medium Approach To Sensitivity Improvement Of MEMS-Based Thermal Acoustic Particle Velocity Sensors., , , , , and . ICICDT, page 1-4. IEEE, (2019)Parylene-coated NMOSFET-embedded cantilevers for surface stress sensing in liquid environment., , , and . NEMS, page 255-258. IEEE, (2010)Silicon-silicon anodic bonding process with embedded glass., , , , , and . NEMS, page 470-475. IEEE, (2015)Anemometer for detection of very low speed air flow with three-dimensional directionality., , , , and . NEMS, page 615-618. IEEE, (2017)Improvement of transient response for drive loop of microgyroscope using 2-DOF PID controller., , , , and . NEMS, page 281-284. IEEE, (2011)