Author of the publication

copy delete add this publication to your clipboard
community post
history of this post
URL
DOI
BibTeX
EndNote
APA
Chicago
DIN 1505
Harvard
MSOffice XML

Comparative study on the properties of amorphous carbon layers deposited from 1-hexene and propylene for dry etch hard mask application in semiconductor device manufacturing

S. Lee, J. Won, J. Choi, J. Park, Y. Jee, H. Lee, and D. Byun. Thin Solid Films, 519 (20): 6683 - 6687 (2011)10th Asia-Pacific Conference on Plasma Science and Technology.
DOI: http://dx.doi.org/10.1016/j.tsf.2011.04.077

Please choose a person to relate this publication to

To differ between persons with the same name, the academic degree and the title of an important publication will be displayed. You can also use the button next to the name to display some publications already assigned to the person.

Jinhyung Park

Kwan Park

Shinja Park

June Park

Sungjune Park

Other publications of authors with the same name

Alignment Between Internal and External IT Governance and Its Effects on Distinctive Firm Performance: An Extended Resource-Based View.J. Park, J. Lee, O. Lee, and Y. Koo. IEEE Trans. Engineering Management, 64 (3): 351-364 (2017)Contour Tracking Using Modified Canny Edge Maps with Level-of-Detail.J. Park. CAIP, volume 3691 of Lecture Notes in Computer Science, page 1-8. Springer, (2005)Geometry-Based Muscle Forces and Inverse Dynamics for Animation.J. Park, S. Park, and Y. Won. Edutainment, volume 4469 of Lecture Notes in Computer Science, page 584-595. Springer, (2007)Chebyshev polynomials over finite fields and reversibility of σ-automata on square gridsM. Hunziker, A. Machiavelo, and J. Park. Theoretical Computer Science, 320 (2–3): 465 - 483 (2004)Human Motion Tracking by Combining View-Based and Model-Based Methods for Monocular Video Sequences.J. Park, S. Park, and J. Aggarwal. ICCSA (3), volume 2669 of Lecture Notes in Computer Science, page 650-659. Springer, (2003)UVMMU: Hardware-Offloaded Page Migration for Heterogeneous Computing.J. Park, D. Jeong, and J. Kim. DATE, page 1-6. IEEE, (2023)Object Tracking and Elimination Using Level-of-Detail Canny Edge Maps.J. Park. AMDO, volume 4069 of Lecture Notes in Computer Science, page 281-290. Springer, (2006)Comparative study on the properties of amorphous carbon layers deposited from 1-hexene and propylene for dry etch hard mask application in semiconductor device manufacturingS. Lee, J. Won, J. Choi, J. Park, Y. Jee, H. Lee, and D. Byun. Thin Solid Films, 519 (20): 6683 - 6687 (2011)10th Asia-Pacific Conference on Plasma Science and Technology.LOD Canny Edge Based Boundary Edge Selection for Human Body Tracking.J. Park, T. Kim, and S. Park. ICIAR (2), volume 3212 of Lecture Notes in Computer Science, page 528-535. Springer, (2004)Object Boundary Edge Selection for Accurate Contour Tracking Using Multi-level Canny Edges.T. Kim, J. Park, and S. Lee. ICIAR (2), volume 3212 of Lecture Notes in Computer Science, page 536-543. Springer, (2004)

BibSonomy

Disambiguation of "Park, Jihun"