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The deep EGS (Enhanced Geothermal System) project at Soultz-sous-Forêts (Alsace, France), , , , , and . Geothermics, 35 (5-6): 473 - 483 (2006)The deep EGS (Enhanced Geothermal System) project at Soultz-sous-Forêts, Alsace, France.A Generic Approach for a Micro Parts Feeding System., , and . IPAS, volume 198 of IFIP, page 43-52. Springer, (2006)Shape behavior analysis of a PMN-PT 001 actuated MOEMS micro-mirror., , , and . AIM, page 453-458. IEEE, (2015)Stereovision-based control for automated MOEMS assembly., , , , and . IROS, page 1391-1396. IEEE, (2015)Practical characterisation of the friction force for the positioning and orientation of micro-components., , , and . IROS, page 931-936. IEEE, (2008)Study and implementation of electrostatic actuation for programmable matter modules., , , , and . AIM, page 1549-1554. IEEE, (2022)Digital microrobotics based on bistable modules: Design of a non-redundant digital micropositioning robot., , , and . ICRA, page 3628-3633. IEEE, (2011)Extended high-gain observer for robust position control of a micro-gripper in air and vacuum., , , and . CASE, page 1626-1631. IEEE, (2015)Photo-Robotic Positioning for Integrated Optics., , , , and . IEEE Robotics Autom. Lett., 2 (1): 217-222 (2017)PID-structured controller design for interval systems: Application to piezoelectric microactuators., , and . ACC, page 3477-3482. IEEE, (2011)