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A Nanosheet Oxide Semiconductor FET Using ALD InGaOx Channel and InSnOx Electrode with Normally-off Operation, High Mobility and Reliability for 3D Integrated Devices.

, , , , , , , , , и . VLSI Technology and Circuits, стр. 1-2. IEEE, (2023)

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Zhuo Li

Zhuo Li

Zhuo Li

Zhuo-Ya Li

Xinping Zhuo

 

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