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Radio frequency power sensor based on MEMS technology

, , , , , , и . Proceedings of IEEE Sensors, (2003)

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Remco Capelleveen

Remco der Velden

 

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Development of a Capacitive MEMS RF Power Sensor without Dissipative Losses: Towards a new Philosophy of RF Power Sensing, , , , , , и . (?)Radio frequency power sensor based on MEMS technology with Ultra Low Losses, , , , и . (2003)Radio frequency power sensor based on MEMS technology, , , , , , и . Proceedings of IEEE Sensors, (2003)A CMOS Wideband Linear Current Attenuator with Electronically Variable Gain.. ISCAS, стр. 962-965. IEEE, (1993)Micro Coriolis Mass Flow Sensor with Large Channel Diameter by Wet Etching of Silicon., , , и . IEEE SENSORS, стр. 1-4. IEEE, (2022)5.7 A MEMS Coriolis Mass Flow Sensor with 300 μ g/h/√Hz Resolution and ± 0.8mg/h Zero Stability., , , и . ISSCC, стр. 84-86. IEEE, (2021)A MEMS Coriolis-Based Mass-Flow-to-Digital Converter for Low Flow Rate Sensing., , , и . IEEE J. Solid State Circuits, 57 (12): 3681-3692 (2022)A Low-voltage CMOS Op Amp with a Rail-to-rail Constant-gm Input Stage and a Class AB Rail-to-rail Output Stage., , и . ISCAS, стр. 1314-1317. IEEE, (1993)Micro Coriolis Mass Flow Sensor Based on Electroplated Nickel Tubes., , , и . IEEE SENSORS, стр. 1-4. IEEE, (2022)Integrated Thermal and Microcoriolis Flow Sensing System with a Dynamic Flow Range of More Than Five Decades., , , , и . Micromachines, 3 (1): 194-203 (2012)