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Design and Modification of a High-Resolution Optical Interferometer Accelerometer.

, , , , , , , , and . Sensors, 21 (6): 2070 (2021)

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A MOEMS Accelerometer Based on Diffraction Grating with Improved Mechanical Structure., , , , , and . Int. J. Autom. Technol., 9 (5): 473-481 (2015)Design and Modification of a High-Resolution Optical Interferometer Accelerometer., , , , , , , , and . Sensors, 21 (6): 2070 (2021)A novel scheme design of a high-g optical NEMS accelerometer based on a single chip grating with proper sensitivity and large bandwidth., , , and . NEMS, page 248-253. IEEE, (2015)Self-Excitation Enabled Decoupling, Calibration, and Compensation of Errors for Whole-Angle Hemispherical Resonator Gyroscope., , , , , , and . IEEE Trans. Instrum. Meas., (2024)Optical Acceleration Measurement Method with Large Non-ambiguity Range and High Resolution via Synthetic Wavelength and Single Wavelength Superheterodyne Interferometry., , , and . Sensors, 18 (10): 3417 (2018)Bandwidth Optimization of MEMS Accelerometers in Fluid Medium Environment., , , , , , , and . Sensors, 22 (24): 9855 (2022)Interactive Errors Analysis and Scale Factor Nonlinearity Reduction Methods for Lissajous Frequency Modulated MEMS Gyroscope., , , , , , , and . Sensors, 23 (24): 9701 (December 2023)Single Chip-Based Nano-Optomechanical Accelerometer Based on Subwavelength Grating Pair and Rotated Serpentine Springs., , , , , and . Sensors, 18 (7): 2036 (2018)Extending the Validity of Squeeze Film Damping Models with Lower Aspect Ratios., , , , , and . Sensors, 22 (3): 1054 (2022)