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Petri Net Modeling and Lagrangian Relaxation Approach to Vehicle Scheduling in 300 mm Semiconductor Manufacturing.

, , and . ICRA, page 5301-5306. IEEE, (2004)

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Modeling a discrete event system using statecharts, , and . 2, page 1093--1098. (2004)Normalized In-Line Stepper Coordinator Design by the Sequence Diagram and Production Rules: A Case Study., and . ICRA, page 3169-3174. IEEE, (2002)An Unsupervised Self-Organizing Neural Network for Automatic Semiconductor Wafer Defect Inspection., , and . ICRA, page 3000-3005. IEEE, (2005)Using a self-organizing neural network for wafer defect inspection., , and . SMC (5), page 4312-4317. IEEE, (2004)An Agent-Based Early Manufacturability Assessment for Collaborative Design in Coating Process., , , and . KES (2), volume 4693 of Lecture Notes in Computer Science, page 649-655. Springer, (2007)A polynomial algorithm for checking diagnosability of Petri nets., , and . SMC, page 2542-2547. IEEE, (2005)Modeling and analysis of traffic light controller using Statechart., , and . SMC, page 557-562. IEEE, (2010)Enhancement of an deadlock prevention policy for FMSs using theory of regions., , , and . SMC, page 304-309. IEEE, (2010)Petri Net Modeling and Lagrangian Relaxation Approach to Vehicle Scheduling in 300 mm Semiconductor Manufacturing., , and . ICRA, page 5301-5306. IEEE, (2004)Separation model design of manufacturing systems using the distributed agent-oriented Petri net., , , and . Int. J. Computer Integrated Manufacturing, 18 (2&3): 146-157 (2005)