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Linearity analysis of closed-loop capacitive accelerometer due to distance mismatch between plates and the influence of compensation capacitor array.

J. Huang, M. Zhao, T. Zhang, Z. Chen, L. Hong, F. Wu, Y. Zhang, W. Lu, C. Gao, and Y. Hao. Sci. China Inf. Sci., 57 (6): 1-12 (2014)

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Yilong Cao

Xiaofei Hao

Wenjin Hao

Jin Hao

Jun Hao

Other publications of authors with the same name

High-Performance Quasi-Vertical GaN Schottky Barrier Diode on Silicon Substrate with a Low Dislocation Density Drift Layer.Y. Li, R. Yin, M. Tao, Y. Hao, C. Wen, M. Wang, J. Zhang, X. Yang, and B. Shen. ICICDT, page 1-3. IEEE, (2019)High temperature pressure sensor using a thermostable electrode.G. Liu, W. Cui, H. Hu, F. Zhang, Y. Zhang, C. Gao, and Y. Hao. NEMS, page 201-204. IEEE, (2015)Design and fabrication of a mems capacitive accelerometer based on double-device-layers SOI wafer.Q. Hu, C. Gao, Y. Hao, D. Zhang, G. Yan, and Y. Zhang. NEMS, page 1036-1039. IEEE, (2010)Design and simulation of MEMS thermal and vibration isolator based on PDMS beam arrays.K. Xu, N. Zhu, S. Cao, W. Su, W. Zhang, and Y. Hao. NEMS, page 213-216. IEEE, (2016)Design of a graphene capacitive pressure sensor for ultra-low pressure detection.Y. Zhang, Y. Gui, F. Meng, C. Gao, and Y. Hao. NEMS, page 192-195. IEEE, (2016)A Gas Medium Approach To Sensitivity Improvement Of MEMS-Based Thermal Acoustic Particle Velocity Sensors.W. Chang, Z. Li, S. Cheng, S. Sun, C. Gao, and Y. Hao. ICICDT, page 1-4. IEEE, (2019)Parylene-coated NMOSFET-embedded cantilevers for surface stress sensing in liquid environment.J. Wang, Y. Huang, W. Wu, and Y. Hao. NEMS, page 255-258. IEEE, (2010)Silicon-silicon anodic bonding process with embedded glass.W. Cui, G. Liu, F. Zhang, H. Hu, C. Gao, and Y. Hao. NEMS, page 470-475. IEEE, (2015)Second order design of multiclass kernel machines.Y. Hao, K. Tyagi, R. Rawat, and M. Manry. IJCNN, page 3233-3240. IEEE, (2016)Improvement of transient response for drive loop of microgyroscope using 2-DOF PID controller.J. Cui, Z. Guo, Z. Yang, Y. Hao, and G. Yan. NEMS, page 281-284. IEEE, (2011)

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Disambiguation of "Hao, Yilong"

Please choose a person to relate this publication to

Yilong Cao

Xiaofei Hao

Wenjin Hao

Jin Hao

Jun Hao

Other publications of authors with the same name

Disambiguation

BibSonomy

Disambiguation of "Hao, Yilong"

copydeleteadd this publication to your clipboardcommunity posthistory of this postURLDOIBibTeXEndNoteAPAChicagoDIN 1505HarvardMSOffice XML Linearity analysis of closed-loop capacitive accelerometer due to distance mismatch between plates and the influence of compensation capacitor array.

Please choose a person to relate this publication to

Yilong Cao

Xiaofei Hao

Wenjin Hao

Jin Hao

Jun Hao

Other publications of authors with the same name

Disambiguation