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Fast Pixelated Lithographic Source and Mask Joint Optimization Based on Compressive Sensing.

, , , , и . IEEE Trans. Computational Imaging, (2020)

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Reinerio Arce Valentín

Ute Arcéus-Vassmer

Reinerio Arce Valentín

José Arce Luna

Reinerio Arce Valentín

 

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