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A quadruple-anchored RF-MEMS switch for switched-line phase shifters., , , , and . NEMS, page 149-152. IEEE, (2010)A Flexible Pressure Sensor Based on Low-Cost Electroplated-Ni Film Induced Cracking for Wearable Devices Application., , , , , and . NEMS, page 432-435. IEEE, (2018)Resin-bonded NdFeB micromagnets for integration into electromagnetic vibration energy harvesters., , , and . Journal of Zhejiang University - Science C, 14 (4): 283-287 (2013)Study on Complementary Auxiliary Cathode Method for Improving the Microstructure Uniformity of Electroplated Thick Metal Film., , , , and . NEMS, page 78-81. IEEE, (2023)A new electroplating mask for deep wet etching on glass., , , , , and . NEMS, page 454-457. IEEE, (2010)Fabrication of a MEMS inertia switch on quartz substrate and evaluation of its threshold acceleration., , , and . Microelectron. J., 39 (9): 1112-1119 (2008)Preparation, Characterization, Insulation Study of Al2O3 Thin Film Deposited by Dual Ion Beam Sputtering., , , and . NEMS, page 115-118. IEEE, (2018)Palladium Sensitive Thin Film on Micro Hotplate for Fast Response/Recovery., , and . NEMS, page 462-465. IEEE, (2019)An electro-thermal SU-8 cantilever micro actuator based on bimorph effect., , , , and . NEMS, page 362-365. IEEE, (2010)Design and simulation of MEMS-based CPW-fed unidirectional antenna array with air bridges., , , and . NEMS, page 145-148. IEEE, (2010)