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Three DFM Challenges: Random Defects, Thickness Variation, and Printability Variation.

, and . APCCAS, page 1099-1102. IEEE, (2006)

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Improved tangent space based distance metric for accurate lithographic hotspot classification., , , , and . DAC, page 1173-1178. ACM, (2012)Machine-learning-based hotspot detection using topological classification and critical feature extraction., , , and . DAC, page 67:1-67:6. ACM, (2013)Two-sided projection method in variational equation model order reduction of nonlinear circuits., , , , and . ISCAS (4), page 816-819. IEEE, (2004)DRC-based hotspot detection considering edge tolerance and incomplete specification., , , and . ICCAD, page 101-107. IEEE, (2014)The road to 3D EDA tool readiness., and . ASP-DAC, page 429-436. IEEE, (2009)Hotspot Based Yield Prediction with Consideration of Correlations., , and . ISQED, page 338-343. IEEE Computer Society, (2008)On wiring overlap layouts.. Great Lakes Symposium on VLSI, page 25-30. IEEE, (1991)An optimal algorithm for rectilinear steiner trees for channels with obstacles., , and . I. J. Circuit Theory and Applications, 19 (6): 551-563 (1991)Efficient range pattern matching algorithm for process-hotspot detection., , , , , and . IET Circuits Devices Syst., 2 (1): 2-15 (2008)Fast and scalable parallel layout decomposition in double patterning lithography., , , , and . Integr., 47 (2): 175-183 (2014)