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BEOL Interconnect Innovation: Materials, Process and Systems Co-optimization for 3nm Node and Beyond.

, , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , и . VLSI Technology and Circuits, стр. 1-2. IEEE, (2023)

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Qing Shengzu

Lan Qing

Li Qing

Ma Qing

Qing Ye

 

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