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Process Development for Very Deep Etching of Silicon Using Two Layer Masks for Fabrication of Mechanically Decoupled MEMS Gyroscope.

D. Sharma, J. John, G. Supriya, A. Jambhalikar, и M. Giridhar. VDAT, стр. 1-4. IEEE, (2021)

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Modern Feedback System A SurveyS. Garg, S. Sarma, S. G, S. Naureen, и D. R. International Journal on Recent and Innovation Trends in Computing and Communication, 3 (4): 2090--2096 (апреля 2015)Process Development for Very Deep Etching of Silicon Using Two Layer Masks for Fabrication of Mechanically Decoupled MEMS Gyroscope.D. Sharma, J. John, G. Supriya, A. Jambhalikar, и M. Giridhar. VDAT, стр. 1-4. IEEE, (2021)Review Article on Chaturvidha Svedana and it’s Clinical ApplicationD. Bhosale. INTERNATIONAL JOURNAL OF TREND IN SCIENTIFIC RESEARCH AND DEVELOPMENT, 6 (3): 291-296 (марта 2022)A Review Article on Mode of Action of PadabhyangaD. Guddad. INTERNATIONAL JOURNAL OF TREND IN SCIENTIFIC RESEARCH AND DEVELOPMENT, 6 (3): 383-387 (марта 2022)