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A Resonant Differential Pressure Microsensor With a Stress Isolation Layer.

, , , , , and . NEMS, page 1691-1694. IEEE, (2021)

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A MEMS Based Electrochemical Rotational Vibration Sensor., , , , , , , and . NEMS, page 63-66. IEEE, (2020)A Novel High-Pressure Resonant Microsensor Based on Volume Compressed Sensing., , , , , , , and . SENSORS, page 1-4. IEEE, (2023)A Quadrature Phase-Locked Loop Based Digital Closed-Loop System for MEMS Resonant Sensors., , , , , , , , and . SENSORS, page 1-4. IEEE, (2023)Micro-machined resonant accelerometer with high sensitivity., , , , and . NEMS, page 527-530. IEEE, (2011)An electrostatically-driven and capacitively-sensed differential lateral resonant pressure microsensor., , , , and . NEMS, page 1271-1274. IEEE, (2013)An Electromagnetically Excited Silicon Nitride Beam Resonant Accelerometer., , , , and . Sensors, 9 (3): 1330-1338 (2009)Numerical study of the frequency charateristics of the electrochemical seismometer., , , , , and . IEEE SENSORS, page 1-3. IEEE, (2017)A Resonant Pressure Microsensor Optimized by DETF Resonators., , , , , , , and . SENSORS, page 1-4. IEEE, (2023)A novel method based on RF detection enabling wireless and passive LC sensing., , , , and . IEEE SENSORS, page 1-3. IEEE, (2016)Development of a Microfluidic Platform for High-Throughput Characterization of Multiple Biophysical Properties of Single-Cell Membranes., , , , , , , , and . SENSORS, page 1-4. IEEE, (2023)