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Precision wearable accelerometer contact microphones for longitudinal monitoring of mechano-acoustic cardiopulmonary signals.

, , , , , and . npj Digit. Medicine, (2020)

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Fully Integrated High-Frequency MEMS and CMOS Inertial Measurement Systems: Taking a Journey from Silicon to Silicon Carbide., , , , and . PLANS, page 18-24. IEEE, (2023)Hermetically-Encapsulated Unidirectional Accelerometer Contact Microphone for Wearable Applications., , , , and . IEEE SENSORS, page 1-4. IEEE, (2019)A Chopper-Stabilized Lateral-BJT-Input Interface in 0.6μm CMOS for Capacitive Accelerometers., , and . ISSCC, page 584-585. IEEE, (2008)CMOS ASIC for MHz silicon BAW gyroscope., , , and . ISCAS, page 2458-2461. IEEE, (2008)Micromachined inertial sensors., , and . Proc. IEEE, 86 (8): 1640-1659 (1998)A 7-MHz process, temperature and supply compensated clock oscillator in 0.25µm CMOS., , , , and . ISCAS (1), page 693-696. IEEE, (2003)A piezo-capacitive BAW accelerometer with extended dynamic range using a gap-changing moving electrode., , , , and . PLANS, page 283-287. IEEE, (2018)A Low Phase Noise 100MHz Silicon BAW Reference Oscillator., , , and . CICC, page 841-844. IEEE, (2006)A Dual-Axis Resonant Accelerometer Based on Electrostatic Stiffness Modulation in Epi-Seal Process., , , , , and . IEEE SENSORS, page 1-4. IEEE, (2019)Is fabless MEMS fabulous?. ISSCC, page 513. IEEE, (2009)