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Six Degrees of Freedom Displacement Measurement System for Wafer Stage Composed of Hall Sensors.

B. Zhao, W. Shi, J. Zhang, M. Zhang, X. Qi, J. Li, F. Li, and J. Tan. Sensors, 18 (7): 2030 (2018)

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Albert Tan

Dao Tan

Vivien Tan

Ming Tan

Tangsheng Tan

Other publications of authors with the same name

An Optoelectronic Equivalent Narrowband Filter for High Resolution Optical Spectrum Analysis.K. Feng, J. Cui, H. Dang, W. Wu, X. Sun, X. Jiang, and J. Tan. Sensors, 17 (2): 348 (2017)Prediction Method of Concentricity and Perpendicularity of Aero Engine Multistage Rotors Based on PSO-BP Neural Network.C. Sun, C. Li, Y. Liu, Z. Liu, X. Wang, and J. Tan. IEEE Access, (2019)Robust selection of the degrees of freedom in the Student's t distribution through Multiple Model Adaptive Estimation.Q. Li, Y. Ben, J. Tan, S. Naqvi, and J. Chambers. Signal Process., (2018)Nonlinear EMC Modeling and Analysis of Permanent-Magnet Slotted Limited-Angle Torque Motor.G. Yu, Y. Xu, T. Lin, L. Xiao, J. Zou, and J. Tan. IEEE Trans. Ind. Electron., 68 (9): 8507-8518 (2021)Multi-stage rotors assembly of turbine-based combined cycle engine based on augmented reality.Y. Mei, Y. Liu, C. Sun, X. Wang, D. Wang, L. Yuan, and J. Tan. Adv. Eng. Informatics, (October 2023)Online-Offline Optimized Motion Profile for High-Dynamic Positioning of Ultraprecision Dual Stage.Y. Liu, Y. Dong, and J. Tan. Complex., (2018)The Improvements of the NIM-2 Joule Balance.Z. Li, Y. Bai, J. Xu, Q. You, D. Wang, Z. Zhang, Y. Lu, P. Hu, Y. Liu, Q. He and 1 other author(s). IEEE Trans. Instrum. Meas., 68 (6): 2208-2214 (2019)Design and Realization of a Three Degrees of Freedom Displacement Measurement System Composed of Hall Sensors Based on Magnetic Field Fitting by an Elliptic Function.B. Zhao, L. Wang, and J. Tan. Sensors, 15 (9): 22530-22546 (2015)Interference Confocal Microscope Integrated with Spatial Phase Shifter.W. Wang, K. Gu, X. You, J. Tan, and J. Liu. Sensors, 16 (9): 1358 (2016)Analysis of a Segmented Annular Coplanar Capacitive Tilt Sensor with Increased Sensitivity.J. Guo, P. Hu, and J. Tan. Sensors, 16 (1): 133 (2016)

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Disambiguation of "Tan, Jiubin"

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URL
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Six Degrees of Freedom Displacement Measurement System for Wafer Stage Composed of Hall Sensors.

Please choose a person to relate this publication to

Albert Tan

Dao Tan

Vivien Tan

Ming Tan

Tangsheng Tan

Other publications of authors with the same name

Disambiguation

BibSonomy

Disambiguation of "Tan, Jiubin"

copydeleteadd this publication to your clipboardcommunity posthistory of this postURLDOIBibTeXEndNoteAPAChicagoDIN 1505HarvardMSOffice XML Six Degrees of Freedom Displacement Measurement System for Wafer Stage Composed of Hall Sensors.

Please choose a person to relate this publication to

Albert Tan

Dao Tan

Vivien Tan

Ming Tan

Tangsheng Tan

Other publications of authors with the same name

Disambiguation

copy delete add this publication to your clipboard
community post
history of this post
URL
DOI
BibTeX
EndNote
APA
Chicago
DIN 1505
Harvard
MSOffice XML

Six Degrees of Freedom Displacement Measurement System for Wafer Stage Composed of Hall Sensors.