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Integration of HfO2-based 3D OxRAM with GAA stacked-nanosheet transistor for high-density embedded memory.

, , , , , , , , , , , , , , и . ESSDERC, стр. 117-120. IEEE, (2023)

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Lambert Timphus

Lambert Hoenen

Gertraud Lambert

Fritz Lambert

Heidi Lambert

 

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