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Compact heterodyne NEMS oscillator for sensing applications., , , , , и . ESSDERC, стр. 146-148. IEEE, (2015)A 20 ppb Resolution Readout Circuit Dedicated to Optomechanical Mass Sensors., , , , , , и . IEEE SENSORS, стр. 1-4. IEEE, (2022)15.6 A 30-to-80MHz simultaneous dual-mode heterodyne oscillator targeting NEMS array gravimetric sensing applications with a 300zg mass resolution., , , , , , , и . ISSCC, стр. 266-267. IEEE, (2017)Nanomechanical mass sensor for monitoring deposition rates through confined apertures., , , , , , , , и . NEMS, стр. 94-97. IEEE Computer Society, (2009)50-kHz MEMS gyroscopes based on NEMS sensing with 1.3 mdps/√Hz ARW and 0.5°/h stability., , , , , , и . IEEE SENSORS, стр. 1-4. IEEE, (2020)Simultaneous mode tracking for sensing applications with dual-mode heterodyne NEMS oscillator., , , , , и . IEEE SENSORS, стр. 1-3. IEEE, (2016)0.02 °/h, 0.004°/√h, 6.3-mA NEMS Gyroscope With Integrated Circuit., , , и . IEEE Trans. Instrum. Meas., (2023)Top-Down CMOS-NEMS Polysilicon Nanowire with Piezoresistive Transduction., , , , и . Sensors, 15 (7): 17036-17047 (2015)