%0 Journal Article %1 journals/tase/PanZQW18 %A Pan, ChunRong %A Zhou, MengChu %A Qiao, Yan %A Wu, Naiqi %D 2018 %J IEEE Trans Autom. Sci. Eng. %K dblp %N 2 %P 586-601 %T Scheduling Cluster Tools in Semiconductor Manufacturing: Recent Advances and Challenges. %U http://dblp.uni-trier.de/db/journals/tase/tase15.html#PanZQW18 %V 15

@article{journals/tase/PanZQW18, added-at = {2020-04-02T00:00:00.000+0200}, author = {Pan, ChunRong and Zhou, MengChu and Qiao, Yan and Wu, Naiqi}, biburl = {https://www.bibsonomy.org/bibtex/27758b93b924571b4d201fabf268133ad/dblp}, ee = {https://doi.org/10.1109/TASE.2016.2642997}, interhash = {713685103d13d6454dbb91fbd0f75fc3}, intrahash = {7758b93b924571b4d201fabf268133ad}, journal = {IEEE Trans Autom. Sci. Eng.}, keywords = {dblp}, number = 2, pages = {586-601}, timestamp = {2020-04-03T12:04:02.000+0200}, title = {Scheduling Cluster Tools in Semiconductor Manufacturing: Recent Advances and Challenges.}, url = {http://dblp.uni-trier.de/db/journals/tase/tase15.html#PanZQW18}, volume = 15, year = 2018 }