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Scheduling Cluster Tools in Semiconductor Manufacturing: Recent Advances and Challenges.

, , , and . IEEE Trans Autom. Sci. Eng., 15 (2): 586-601 (2018)

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Distributed denial of service attacks in software-defined networking with cloud computing., and . IEEE Communications Magazine, 53 (4): 52-59 (2015)Optimal scheduling analysis of treelike hybrid multi-cluster tools., , , and . CASE, page 1400-1404. IEEE, (2016)A novel failure response policy for single-arm cluster tools with residency time constraints., , , and . SMC, page 120-126. IEEE, (2014)An efficient protocol for RFID multigroup threshold-based classification., , and . INFOCOM, page 890-898. IEEE, (2013)Robust Loss Inference in the Presence of Noisy Measurements and Hidden Fault Diagnosis., , , and . IEEE/ACM Trans. Netw., 28 (1): 43-56 (2020)Response Policies to Process Module Failure in Single-Arm Cluster Tools Subject to Wafer Residency Time Constraints., , , and . IEEE Trans Autom. Sci. Eng., 12 (3): 1125-1139 (2015)Real-Time Scheduling of Single-Arm Cluster Tools Subject to Residency Time Constraints and Bounded Activity Time Variation., , and . IEEE Trans Autom. Sci. Eng., 9 (3): 564-577 (2012)Using MTD and SDN-based Honeypots to Defend DDoS Attacks in IoT., , , and . ComComAP, page 392-395. IEEE, (2019)Adaptive genetic algorithm for two-stage hybrid flow-shop scheduling with sequence-independent setup time and no-interruption requirement., , , , and . Expert Syst. Appl., (2022)Optimal One-Wafer Cyclic Scheduling of Single-Arm Multicluster Tools With Two-Space Buffering Modules., , , and . IEEE Trans. Syst. Man Cybern. Syst., 44 (12): 1584-1597 (2014)