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Scheduling Cluster Tools in Semiconductor Manufacturing: Recent Advances and Challenges.

, , , and . IEEE Trans Autom. Sci. Eng., 15 (2): 586-601 (2018)

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Manufacturing process reengineering for mass customization by using flexibility analysis., , and . SMC (6), page 5062-5067. IEEE, (2004)Real-time control policy for single-arm cluster tools with residency time constraints and activity time variation by using Petri net., , and . ICNSC, page 34-39. IEEE, (2012)A novel method for deadlock prevention of AMS by using resource-oriented Petri nets., , and . Inf. Sci., (2016)Efficient and optimal scheduling of time-constrained hybrid multi-cluster tools in semiconductor industry., , , and . ICNSC, page 1-6. IEEE, (2016)IoT-based smart and complex systems: a guest editorial report., , , , , and . IEEE CAA J. Autom. Sinica, 5 (1): 69-73 (2018)Joint Specifics and Dual-Semantic Hashing Learning for Cross-Modal Retrieval., , , , , , and . Neurocomputing, (January 2024)Adjacent initial states-based differential privacy for probabilistic labeled Petri nets., , , and . Expert Syst. Appl., 237 (Part A): 121454 (March 2024)Online verification of K-step opacity by Petri nets in centralized and decentralized structures., , and . Autom., (2022)Domain adaptation via incremental confidence samples into classification., , , , and . Int. J. Intell. Syst., 37 (1): 365-385 (2022)Multiobjective Scheduling of Dual-Blade Robotic Cells in Wafer Fabrication., , , , and . IEEE Trans. Syst. Man Cybern. Syst., 50 (12): 5015-5023 (2020)