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High-Precision Thickness Measurement of Cu Film on Si-Based Wafer Using Erasable Printed Eddy Current Coil and High-Sensitivity Associated Circuit Techniques.

, , , , and . IEEE Trans. Ind. Electron., 69 (9): 9556-9565 (2022)

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Analysis and Design of Coil-Based Electromagnetic-Induced Thermoacoustic for Rail Internal-Flaw Inspection., , , , , , and . IEEE Trans. Intell. Transp. Syst., 20 (7): 2691-2702 (2019)High-Precision Thickness Measurement of Cu Film on Si-Based Wafer Using Erasable Printed Eddy Current Coil and High-Sensitivity Associated Circuit Techniques., , , , and . IEEE Trans. Ind. Electron., 69 (9): 9556-9565 (2022)High-Sensitivity Signal Processing Circuit Integrated Coil Antenna Sensor Toward Measurements of the Water Fraction in the Oil-Water Two-Phase Flow., , , , , , , and . IEEE Trans. Instrum. Meas., (2023)High-Precision Resistivity Measurement of Silicon Wafer Under Unstable Lift-Off Distance Using Inductive and Laser Sensors-Integrated Probe., , , , and . IEEE Trans. Instrum. Meas., (2023)Noncontact Thickness Measurement of Cu Film on Silicon Wafer Using Magnetic Resonance Coupling for Stress Free Polishing Application., , , , , and . IEEE Access, (2019)Measurement and Error Analysis of Cu Film Thickness With Ta Barrier Layer on Wafer for CMP Application., , , , and . IEEE Trans. Instrum. Meas., (2021)A Time-Division Multiplexing Multi-Channel Micro-Electrochemical Workstation with Carbon-Based Material Electrodes for Online L-Trosine Detection., , , , , , and . Sensors, 23 (14): 6252 (July 2023)