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Wafer Sojourn Time Fluctuation Analysis of Time-Constrained Dual-Arm Cluster Tools With Wafer Revisiting and Activity Time Variation.

, , , , и . IEEE Trans. Syst. Man Cybern. Syst., 48 (4): 622-636 (2018)

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Qinghua Liu

Qinghua Yang

Qinghua Zhao

Qinghua Zheng

Qinghua Cui

 

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