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First Demonstration of BEOL-Compatible MFMIS Fe-FETs with 3D Multi-Fin Floating Gate: In-situ ALD-deposited MFM, LCH of 50 nm, > 2×109 Endurance, and 58.3% Area Saving.

, , , , , , , , , , , and . VLSI Technology and Circuits, page 1-2. IEEE, (2023)

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