%0 Journal Article %1 journals/access/HongZLXSZLH20 %A Hong, Peizhen %A Zhao, Zhiguo %A Luo, Jun %A Xia, Zhiliang %A Su, Xiaojing %A Zhang, Libin %A Li, Chunlong %A Huo, Zongliang %D 2020 %J IEEE Access %K dblp %P 140054-140061 %T An Improved Dimensional Measurement Method of Staircase Patterns With Higher Precision in 3D NAND. %U http://dblp.uni-trier.de/db/journals/access/access8.html#HongZLXSZLH20 %V 8

@article{journals/access/HongZLXSZLH20, added-at = {2020-08-14T00:00:00.000+0200}, author = {Hong, Peizhen and Zhao, Zhiguo and Luo, Jun and Xia, Zhiliang and Su, Xiaojing and Zhang, Libin and Li, Chunlong and Huo, Zongliang}, biburl = {https://www.bibsonomy.org/bibtex/26a13b34560271b0468fa21a09d930a88/dblp}, ee = {https://doi.org/10.1109/ACCESS.2020.3012012}, interhash = {2df5f220c16f7294bacef811a9141920}, intrahash = {6a13b34560271b0468fa21a09d930a88}, journal = {IEEE Access}, keywords = {dblp}, pages = {140054-140061}, timestamp = {2020-08-18T11:42:29.000+0200}, title = {An Improved Dimensional Measurement Method of Staircase Patterns With Higher Precision in 3D NAND.}, url = {http://dblp.uni-trier.de/db/journals/access/access8.html#HongZLXSZLH20}, volume = 8, year = 2020 }