%0 Conference Paper %1 conf/icicdt/TomidaHDHJMCKMH15 %A Tomida, Kazuyuki %A Hiraga, Keizo %A Dehan, Morin %A Hellings, Geert %A Jang, Doyoung %A Miyaguchi, Kenichi %A Chiarella, Thomas %A Kim, Minsoo %A Mocuta, Anda %A Horiguchi, Naoto %A Mercha, Abdelkarim %A Verkest, Diederik %A Thean, Aaron %B ICICDT %D 2015 %I IEEE %K dblp %P 1-4 %T Impact of fin shape variability on device performance towards 10nm node. %U http://dblp.uni-trier.de/db/conf/icicdt/icicdt2015.html#TomidaHDHJMCKMH15 %@ 978-1-4799-7669-0

@inproceedings{conf/icicdt/TomidaHDHJMCKMH15, added-at = {2016-05-17T00:00:00.000+0200}, author = {Tomida, Kazuyuki and Hiraga, Keizo and Dehan, Morin and Hellings, Geert and Jang, Doyoung and Miyaguchi, Kenichi and Chiarella, Thomas and Kim, Minsoo and Mocuta, Anda and Horiguchi, Naoto and Mercha, Abdelkarim and Verkest, Diederik and Thean, Aaron}, biburl = {https://www.bibsonomy.org/bibtex/28f897d02e1d1f986f8e9bf63001e41e9/dblp}, booktitle = {ICICDT}, crossref = {conf/icicdt/2015}, ee = {http://dx.doi.org/10.1109/ICICDT.2015.7165884}, interhash = {36463866503a9e1cc7f9eb91d41fe3c7}, intrahash = {8f897d02e1d1f986f8e9bf63001e41e9}, isbn = {978-1-4799-7669-0}, keywords = {dblp}, pages = {1-4}, publisher = {IEEE}, timestamp = {2016-05-18T11:45:05.000+0200}, title = {Impact of fin shape variability on device performance towards 10nm node.}, url = {http://dblp.uni-trier.de/db/conf/icicdt/icicdt2015.html#TomidaHDHJMCKMH15}, year = 2015 }